Fredrick Seitz Materials Research Laboratory - Microfabrication Facility, Illinois USA |
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| [ Visit Site ] The FS-MRL Microfabrication Facility is a user supported facility located within the Fredrick Seitz Materials Research Laboratory at the University of Illinois Urbana-Champaign. The Microfab facility provides equipment and resources for deposition of thin film material and the fabrication of patterned micro and nano sized structures including SQUID's, MEMS and other multi-layer electronic devices. Currently the facility serves over 100 users from 35 different research groups, including industrial users. |
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